Contamination Control and Cleanrooms: Problems, Engineering by Alvin Lieberman

By Alvin Lieberman

Contamination regulate criteria and strategies for all stages of the construction of high-technology items are spelled out during this applications-orientated consultant. functional cleansing tools for items and method fluids are followed via pointers on identifying operations in accordance with financial system and potency. causes of contaminant size units conceal operation, errors resources and remedial equipment. Engineers will locate important information on contaminant assets, in addition to insurance of operations and approaches that irritate contaminant effects.

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Monkowski, J. , 1984. Significance of Submicrometer Particles to Device Performance. Proceedings of the 30th Annual Technical Meeting, Institute of Environmental Sciences, pp. 81-84, May 1,1984, Orlando. Osburn, C. , 1988. The Effects of Contamination on Semiconductor Manufacturing Yield. Journal oi Environmental Sciences 31(2):45-57. Taylor, S. , 1982. Particulate Contamination of Sterile Syringes and Needles. Journal oi Pharmacy and Pharmacology 34:493-495. S. Army, 1972. S. Naval and Publication Forms Center.

If high-energy fluxes are of concern, the Particle Effects on Products 35 radiation absorption within a contaminant particle surface with areal refractive index and/or an absorption coefficient different from that of the optical element can result in extreme levels of heat at the location of the contaminant particle, causing potential damage to the underlying optical substrate. When low-level changes in light transmission are of concern, as in information transfer situations, then even smalliosses in light by scattering or absorption from contaminant particles in the system can be of concern.

Microcontamination 4(10):45-50. , 1982. Private communication. , 1962. Contamination Effects Study. ARF 3216-5. Armour Research Foundation Report to Sandia Corp. , & Ogle, H. , 1971. Particle Generation in Computer Memory Systems. Proceedings of the International Powder Technology and Bulk Solids Conference, pp. 99-102, London. Monkowski, J. , 1984. Significance of Submicrometer Particles to Device Performance. Proceedings of the 30th Annual Technical Meeting, Institute of Environmental Sciences, pp.

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